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[ Electronics and Information Technology ]
	Proiect Leader : Hiroshi Toshiyoshi

Semiconductor fabrication processes have enabled us to make micron-scale optical components such as mirrors onto a silicon wafer, and interestingly, those optical components can be mechanically actuated by driving forces such as electrostatics. The emerging research field of opto-mechatronics, which is based on a combination of micro-electronics, micro-mechanics, and micro-optics, has now reached a new phase of industrial applications which include, for instance, image-projection displays, fiber-optic switches, and optical data storage.
Control of the light beam intensity or direction by means of micromechatronics has been the heart of conventional opto-mechatronics. Thescope of this new project in KAST,
on the other hand, is to develop a new device principle for actuating micro/nano mechanical devices by means of optical addressing. A combination of these two approaches makes it possible to handle a light beam or light wave by using another light source which interacts with the physical transformation of the medium within extremely small dimensions.
The aims of this project are to create a new device principle of opto-mehcanical interaction and contribute to industry by proposing potential applications to optical computing, fiber-optic devices, and data storage.

Contents of Research

Fig. 1 Micro-scanning mirror controlled by optical addressing Fig. 2 Optical computing using opto-mechanical spatial light modulator array Fig. 3 Concept of new light wave modulation using opto-mechanical interaction		(1) Development of new device principle using opto-mechanical interaction We will investigate design and fabrication methods to monolithically integrate electrostatic micro-actuators which can be operated by optical addressing. For a proof-of-concept study, a micro-mirror (diameter: 1 mm or less) is monolithically integrated into a silicon chip with an electrostatic actuator and a PN-junction photodiode using silicon micromachining technology.   (2) Application to free-space optical computing The above-mentioned micro-mirrors are integrated into an array form and used as a light-beam scanning engine for free-space optical computing or fiber-optic crossconnect.   (3) Control of material properties by means of nanometric opto-mechanical interaction The opto-mechanical interaction is to be extended from the micron range to the nanometric range, and the scaling effect of the device principle will be investigated. The mechanical motion of the integrated nanometric structures will cause modulation of the optical properties of the material, in particular when the device dimensions become equivalent to the wavelength of interest. This could be a breakthrough for the construction of ultra-small photonic light wave circuits.

Organization of Research

Term: April 2005 to March 2008 Members: Project leader, full-time and part-time scientists, and collaborating research staff

Location: Kanagawa Science Park (KSP), East Bldg. 4th floor.

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